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Boundary layer profiles in plasma chemical vapor deposition.
Green DS, Owano TG, Williams S, Goodwin DG, Zare RN, Kruger CH. Green DS, et al. Among authors: owano tg. Science. 1993 Mar 19;259(5102):1726-9. doi: 10.1126/science.259.5102.1726. Science. 1993. PMID: 17816890