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High-Performance SAW Low Temperature Sensors with Double Electrode Transducers Based on 128° YX LiNbO3.
Micromachines (Basel). 2022 Nov 4;13(11):1912. doi: 10.3390/mi13111912.
Micromachines (Basel). 2022.
PMID: 36363932
Free PMC article.
Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO2/IDT/LiNbO3/Diamond/Si.
Zhang H, Wang H.
Zhang H, et al.
Micromachines (Basel). 2021 Oct 21;12(11):1286. doi: 10.3390/mi12111286.
Micromachines (Basel). 2021.
PMID: 34832698
Free PMC article.
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Hybrid Cell Structure for Wideband CMUT: Design Method and Characteristic Analysis.
Wang H, Huang X, Yu L, Ding Q, Zhang H, He C, Zhang W.
Wang H, et al.
Micromachines (Basel). 2021 Sep 29;12(10):1180. doi: 10.3390/mi12101180.
Micromachines (Basel). 2021.
PMID: 34683231
Free PMC article.
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Investigation on Design Theory and Performance Analysis of Vacuum Capacitive Micromachined Ultrasonic Transducer.
Huang X, Wang H, Yu L.
Huang X, et al.
Micromachines (Basel). 2021 Sep 19;12(9):1127. doi: 10.3390/mi12091127.
Micromachines (Basel). 2021.
PMID: 34577770
Free PMC article.
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A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes.
Xu P, Wei Z, Guo Z, Jia L, Han G, Si C, Ning J, Yang F.
Xu P, et al.
Micromachines (Basel). 2021 Apr 30;12(5):506. doi: 10.3390/mi12050506.
Micromachines (Basel). 2021.
PMID: 33946535
Free PMC article.
With the development of the designing and manufacturing level for micro-electromechanical system (MEMS) gyroscopes, the control circuit system has become a key point to determine their internal performance. Nevertheless, the phase delay of electronic components may result …
With the development of the designing and manufacturing level for micro-electromechanical system (MEMS) gyroscopes, the control circuit syst …
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