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Through silicon vias filled with planarized carbon nanotube bundles.
Nanotechnology. 2009 Dec 2;20(48):485203. doi: 10.1088/0957-4484/20/48/485203. Epub 2009 Nov 4.
Nanotechnology. 2009.
PMID: 19887710
Determination of the effective Young's modulus of vertically aligned carbon nanotube arrays: a simple nanotube-based varactor.
Olofsson N, Ek-Weis J, Eriksson A, Idda T, Campbell EE.
Olofsson N, et al.
Nanotechnology. 2009 Sep 23;20(38):385710. doi: 10.1088/0957-4484/20/38/385710. Epub 2009 Aug 28.
Nanotechnology. 2009.
PMID: 19713579
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