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Closed-Loop Characterization of Noise and Stability in a Mode-Localized Resonant MEMS Sensor.
IEEE Trans Ultrason Ferroelectr Freq Control. 2019 Jan;66(1):170-180. doi: 10.1109/TUFFC.2018.2878241. Epub 2018 Oct 26.
IEEE Trans Ultrason Ferroelectr Freq Control. 2019.
PMID: 30371360
A vibrating beam MEMS accelerometer for gravity and seismic measurements.
Mustafazade A, Pandit M, Zhao C, Sobreviela G, Du Z, Steinmann P, Zou X, Howe RT, Seshia AA.
Mustafazade A, et al.
Sci Rep. 2020 Jun 26;10(1):10415. doi: 10.1038/s41598-020-67046-x.
Sci Rep. 2020.
PMID: 32591608
Free PMC article.
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