Development of a Flexible MEMS Sensor for Subsonic Flow.
Murakami K, Shiraishi D, Mizumi S, Oya Y, Omura N, Shibata T, Ichikawa Y, Motosuke M.
Murakami K, et al. Among authors: motosuke m.
Micromachines (Basel). 2022 Aug 12;13(8):1299. doi: 10.3390/mi13081299.
Micromachines (Basel). 2022.
PMID: 36014221
Free PMC article.