Sub-nanometer scale depth patterning on sapphire crystal by femtosecond soft x-ray laser pulse irradiation.
Mikami K, Ishino M, Motoyama H, Dinh TH, Yokomae S, Yamaguchi G, Egawa S, Sakaue K, Mimura H, Higashiguchi T, Kubota Y, Owada S, Iwasaki A, Inubushi Y, Nishikino M.
Mikami K, et al.
Opt Lett. 2023 Oct 1;48(19):5041-5044. doi: 10.1364/OL.501589.
Opt Lett. 2023.
PMID: 37773380