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An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications.
Micromachines (Basel). 2020 Mar 4;11(3):267. doi: 10.3390/mi11030267.
Micromachines (Basel). 2020.
PMID: 32143465
Free PMC article.
Developing a MEMS Device with Built-in Microfluidics for Biophysical Single Cell Characterization.
Takayama Y, Perret G, Kumemura M, Ataka M, Meignan S, Karsten SL, Fujita H, Collard D, Lagadec C, Tarhan MC.
Takayama Y, et al. Among authors: ataka m.
Micromachines (Basel). 2018 Jun 1;9(6):275. doi: 10.3390/mi9060275.
Micromachines (Basel). 2018.
PMID: 30424208
Free PMC article.
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