Selectively Nitrogen Doped ALD-IGZO TFTs with Extremely High Mobility and Reliability.
Kim DG, Choi H, Kim YS, Lee DH, Oh HJ, Lee JH, Kim J, Lee S, Kuh B, Kim T, Kim HY, Park JS.
Kim DG, et al. Among authors: lee dh, lee jh, lee s.
ACS Appl Mater Interfaces. 2023 Jul 5;15(26):31652-31663. doi: 10.1021/acsami.3c05678. Epub 2023 Jun 22.
ACS Appl Mater Interfaces. 2023.
PMID: 37350067