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Experimental Study of the Influence of CH4 and H2 on the Conformation, Chemical Composition, and Luminescence of Silicon Quantum Dots Inlaid in Silicon Carbide Thin Films Grown by Remote Plasma-Enhanced Chemical Vapor Deposition.
León-Guillén R, Muñoz-Rosas AL, Arenas-Alatorre JA, Alonso-Huitrón JC, Pérez-Martínez AL, Rodríguez-Gómez A. León-Guillén R, et al. ACS Omega. 2022 Jun 1;7(23):19640-19647. doi: 10.1021/acsomega.2c01384. eCollection 2022 Jun 14. ACS Omega. 2022. PMID: 35721970 Free PMC article.