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Experimental Study of the Influence of CH4 and H2 on the Conformation, Chemical Composition, and Luminescence of Silicon Quantum Dots Inlaid in Silicon Carbide Thin Films Grown by Remote Plasma-Enhanced Chemical Vapor Deposition.
ACS Omega. 2022 Jun 1;7(23):19640-19647. doi: 10.1021/acsomega.2c01384. eCollection 2022 Jun 14.
ACS Omega. 2022.
PMID: 35721970
Free PMC article.
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