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Design, Simulation, Fabrication, and Characterization of an Electrothermal Tip-Tilt-Piston Large Angle Micromirror for High Fill Factor Segmented Optical Arrays.
Micromachines (Basel). 2021 Apr 12;12(4):419. doi: 10.3390/mi12040419.
Micromachines (Basel). 2021.
PMID: 33921288
Free PMC article.
Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures.
Hall HJ, McDaniel S, Shah P, Torres D, Figueroa J, Starman L.
Hall HJ, et al. Among authors: starman l.
Micromachines (Basel). 2021 Apr 14;12(4):428. doi: 10.3390/mi12040428.
Micromachines (Basel). 2021.
PMID: 33919730
Free PMC article.
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