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Investigation of the RF Sputtering Process and the Properties of Deposited Silicon Oxynitride Layers under Varying Reactive Gas Conditions.
Materials (Basel). 2022 Sep 12;15(18):6313. doi: 10.3390/ma15186313.
Materials (Basel). 2022.
PMID: 36143625
Free PMC article.
Micro-combinatorial sampling of the optical properties of hydrogenated amorphous [Formula: see text] for the entire range of compositions towards a database for optoelectronics.
Kalas B, Zolnai Z, Sáfrán G, Serényi M, Agocs E, Lohner T, Nemeth A, Khánh NQ, Fried M, Petrik P.
Kalas B, et al.
Sci Rep. 2020 Nov 6;10(1):19266. doi: 10.1038/s41598-020-74881-5.
Sci Rep. 2020.
PMID: 33159099
Free PMC article.
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