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Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection.
Biosensors (Basel). 2018 Jul 27;8(3):72. doi: 10.3390/bios8030072.
Biosensors (Basel). 2018.
PMID: 30060476
Free PMC article.
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