Advanced Etching Techniques of LiNbO3 Nanodevices.
Shen B, Hu D, Dai C, Yu X, Tan X, Sun J, Jiang J, Jiang A.
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Nanomaterials (Basel). 2023 Oct 18;13(20):2789. doi: 10.3390/nano13202789.
Nanomaterials (Basel). 2023.
PMID: 37887940
Free PMC article.