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Resistless EUV lithography: Photon-induced oxide patterning on silicon.
Tseng LT, Karadan P, Kazazis D, Constantinou PC, Stock TJZ, Curson NJ, Schofield SR, Muntwiler M, Aeppli G, Ekinci Y. Tseng LT, et al. Among authors: ekinci y. Sci Adv. 2023 Apr 21;9(16):eadf5997. doi: 10.1126/sciadv.adf5997. Epub 2023 Apr 19. Sci Adv. 2023. PMID: 37075116 Free PMC article.
The Extent of Platinum-Induced Hydrogen Spillover on Cerium Dioxide.
Beck A, Kazazis D, Ekinci Y, Li X, Müller Gubler EA, Kleibert A, Willinger MG, Artiglia L, van Bokhoven JA. Beck A, et al. Among authors: ekinci y. ACS Nano. 2022 Dec 5. doi: 10.1021/acsnano.2c08152. Online ahead of print. ACS Nano. 2022. PMID: 36469418
87 results