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Micromechanical Characterization of Polysilicon Films through On-Chip Tests.
Sensors (Basel). 2016 Jul 28;16(8):1191. doi: 10.3390/s16081191.
Sensors (Basel). 2016.
PMID: 27483268
Free PMC article.
Mechanical Characterization of Polysilicon MEMS: A Hybrid TMCMC/POD-Kriging Approach.
Mirzazadeh R, Eftekhar Azam S, Mariani S.
Mirzazadeh R, et al. Among authors: eftekhar azam s.
Sensors (Basel). 2018 Apr 17;18(4):1243. doi: 10.3390/s18041243.
Sensors (Basel). 2018.
PMID: 29673228
Free PMC article.
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