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Damage Accumulation Phenomena in Multilayer (TiAlCrSiY)N/(TiAlCr)N, Monolayer (TiAlCrSiY)N Coatings and Silicon upon Deformation by Cyclic Nanoindentation.
Nanomaterials (Basel). 2022 Apr 11;12(8):1312. doi: 10.3390/nano12081312.
Nanomaterials (Basel). 2022.
PMID: 35458020
Free PMC article.
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