SIMS Analysis of Thin EUV Photoresist Films.
Spampinato V, Franquet A, De Simone D, Pollentier I, Pirkl A, Oka H, van der Heide P.
Spampinato V, et al. Among authors: de simone d.
Anal Chem. 2022 Feb 8;94(5):2408-2415. doi: 10.1021/acs.analchem.1c04012. Epub 2022 Jan 25.
Anal Chem. 2022.
PMID: 35076209