Real-time fault classification for plasma processes.
Yang R, Chen R.
Yang R, et al. Among authors: chen r.
Sensors (Basel). 2011;11(7):7037-54. doi: 10.3390/s110707037. Epub 2011 Jul 6.
Sensors (Basel). 2011.
PMID: 22164001
Free PMC article.
Splitting into twelve different match rates by spectrum bands, the matching rate indicator in our previous work (Yang, R.; Chen, R.S. Sensors 2010, 10, 5703-5723) is used to detect the fault process. ...
Splitting into twelve different match rates by spectrum bands, the matching rate indicator in our previous work (Yang, R.; Chen …