Rapid identification of ultrathin amorphous damage on monocrystalline silicon surface.
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Wu L , et al. Among authors: chen p, chen s.
Phys Chem Chem Phys. 2020 Jun 21;22(23):12987-12995. doi: 10.1039/d0cp01370f. Epub 2020 Jun 1.
Phys Chem Chem Phys. 2020.
PMID: 32475997