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Surface Passivation of III-V GaAs Nanopillars by Low-Frequency Plasma Deposition of Silicon Nitride for Active Nanophotonic Devices.
ACS Appl Electron Mater. 2022 Jul 26;4(7):3399-3410. doi: 10.1021/acsaelm.2c00195. Epub 2022 Jul 1.
ACS Appl Electron Mater. 2022.
PMID: 36570334
Free PMC article.
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