Experimental comparison of a Shack-Hartmann sensor and a phase-shifting interferometer for large-optics metrology applications.
Koch JA, Presta RW, Sacks RA, Zacharias RA, Bliss ES, Dailey MJ, Feldman M, Grey AA, Holdener FR, Salmon JT, Seppala LG, Toeppen JS, Van Atta L, Van Wonterghem BM, Whistler WT, Winters SE, Woods BW.
Koch JA, et al. Among authors: bliss es.
Appl Opt. 2000 Sep 1;39(25):4540-6. doi: 10.1364/ao.39.004540.
Appl Opt. 2000.
PMID: 18350042