3D Patterning of Si by Contact Etching With Nanoporous Metals.
Bastide S, Torralba E, Halbwax M, Le Gall S, Mpogui E, Cachet-Vivier C, Magnin V, Harari J, Yarekha D, Vilcot JP.
Bastide S, et al.
Front Chem. 2019 Apr 25;7:256. doi: 10.3389/fchem.2019.00256. eCollection 2019.
Front Chem. 2019.
PMID: 31106193
Free PMC article.