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Low-loss silicon nitride photonic ICs for near-infrared wavelength bandwidth.
Opt Express. 2023 May 8;31(10):16227-16242. doi: 10.1364/OE.477458.
Opt Express. 2023.
PMID: 37157706
Free article.
Self-Controlled Cleaving Method for Silicon DRIE Process Cross-Section Characterization.
Baklykov DA, Andronic M, Sorokina OS, Avdeev SS, Buzaverov KA, Ryzhikov IA, Rodionov IA.
Baklykov DA, et al. Among authors: avdeev ss.
Micromachines (Basel). 2021 May 8;12(5):534. doi: 10.3390/mi12050534.
Micromachines (Basel). 2021.
PMID: 34066851
Free PMC article.
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