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2022 | 1 |
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High Oxygen Sensitivity of TiO2 Thin Films Deposited by ALD.
Micromachines (Basel). 2023 Sep 29;14(10):1875. doi: 10.3390/mi14101875.
Micromachines (Basel). 2023.
PMID: 37893312
Free PMC article.
ITO Thin Films for Low-Resistance Gas Sensors.
Almaev AV, Kopyev VV, Novikov VA, Chikiryaka AV, Yakovlev NN, Usseinov AB, Karipbayev ZT, Akilbekov AT, Koishybayeva ZK, Popov AI.
Almaev AV, et al.
Materials (Basel). 2022 Dec 29;16(1):342. doi: 10.3390/ma16010342.
Materials (Basel). 2022.
PMID: 36614681
Free PMC article.
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