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Wet-Oxidation-Assisted Chemical Mechanical Polishing and High-Temperature Thermal Annealing for Low-Loss 4H-SiC Integrated Photonic Devices.
Materials (Basel). 2023 Mar 14;16(6):2324. doi: 10.3390/ma16062324.
Materials (Basel). 2023.
PMID: 36984202
Free PMC article.
Novel Photonic Applications of Silicon Carbide.
Ou H, Shi X, Lu Y, Kollmuss M, Steiner J, Tabouret V, Syväjärvi M, Wellmann P, Chaussende D.
Ou H, et al.
Materials (Basel). 2023 Jan 22;16(3):1014. doi: 10.3390/ma16031014.
Materials (Basel). 2023.
PMID: 36770020
Free PMC article.
Review.
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