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Effect of Mask Geometry Variation on Plasma Etching Profiles.
Micromachines (Basel). 2023 Mar 16;14(3):665. doi: 10.3390/mi14030665.
Micromachines (Basel). 2023.
PMID: 36985072
Free PMC article.
Application of Two-Dimensional Materials towards CMOS-Integrated Gas Sensors.
Filipovic L, Selberherr S.
Filipovic L, et al.
Nanomaterials (Basel). 2022 Oct 18;12(20):3651. doi: 10.3390/nano12203651.
Nanomaterials (Basel). 2022.
PMID: 36296844
Free PMC article.
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