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An All-Silicon Resonant Pressure Microsensor Based on Eutectic Bonding.
Micromachines (Basel). 2023 Feb 13;14(2):441. doi: 10.3390/mi14020441.
Micromachines (Basel). 2023.
PMID: 36838141
Free PMC article.
A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure.
Chen M, Zhong A, Lu Y, Chen J, Chen D, Wang J.
Chen M, et al.
Micromachines (Basel). 2022 Jan 26;13(2):186. doi: 10.3390/mi13020186.
Micromachines (Basel). 2022.
PMID: 35208310
Free PMC article.
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