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An All-Silicon Resonant Pressure Microsensor Based on Eutectic Bonding.
Micromachines (Basel). 2023 Feb 13;14(2):441. doi: 10.3390/mi14020441.
Micromachines (Basel). 2023.
PMID: 36838141
Free PMC article.
A Piezoresistive Pressure Sensor with Optimized Positions and Thickness of Piezoresistors.
Meng Q, Lu Y, Wang J, Chen D, Chen J.
Meng Q, et al.
Micromachines (Basel). 2021 Sep 11;12(9):1095. doi: 10.3390/mi12091095.
Micromachines (Basel). 2021.
PMID: 34577738
Free PMC article.
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