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Tailoring the Hybrid Magnetron Sputtering Process (HiPIMS and dcMS) to Manufacture Ceramic Multilayers: Powering Conditions, Target Materials, and Base Layers.
Nanomaterials (Basel). 2022 Jul 18;12(14):2465. doi: 10.3390/nano12142465.
Nanomaterials (Basel). 2022.
PMID: 35889689
Free PMC article.
Role of Nitrogen and Yttrium Contents in Manufacturing (Cr, Y)Nx Film Nanostructures.
Apolinario RC, Rodrigues AM, Avila PRT, Pereira JN, Ramirez CAO, Daum P, Costa FPD, Lira HL, Neves GA, Greiner C, Pinto HC.
Apolinario RC, et al.
Nanomaterials (Basel). 2022 Jul 14;12(14):2410. doi: 10.3390/nano12142410.
Nanomaterials (Basel). 2022.
PMID: 35889635
Free PMC article.
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