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2020 | 1 |
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Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating.
Micromachines (Basel). 2021 May 21;12(6):588. doi: 10.3390/mi12060588.
Micromachines (Basel). 2021.
PMID: 34063804
Free PMC article.
MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion.
Chiappim W, Watanabe M, Dias V, Testoni G, Rangel R, Fraga M, Maciel H, Dos Santos Filho S, Pessoa R.
Chiappim W, et al.
Nanomaterials (Basel). 2020 Feb 17;10(2):338. doi: 10.3390/nano10020338.
Nanomaterials (Basel). 2020.
PMID: 32079219
Free PMC article.
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Atomic Layer Deposited TiO₂ and Al₂O₃ Thin Films as Coatings for Aluminum Food Packaging Application.
Dias V, Maciel H, Fraga M, Lobo AO, Pessoa R, Marciano FR.
Dias V, et al.
Materials (Basel). 2019 Feb 25;12(4):682. doi: 10.3390/ma12040682.
Materials (Basel). 2019.
PMID: 30823576
Free PMC article.
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