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Year | Number of Results |
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2019 | 1 |
2020 | 2 |
2021 | 1 |
2024 | 0 |
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Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating.
Micromachines (Basel). 2021 May 21;12(6):588. doi: 10.3390/mi12060588.
Micromachines (Basel). 2021.
PMID: 34063804
Free PMC article.
Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS.
Fraga M, Pessoa R.
Fraga M, et al.
Micromachines (Basel). 2020 Aug 24;11(9):799. doi: 10.3390/mi11090799.
Micromachines (Basel). 2020.
PMID: 32846964
Free PMC article.
Review.
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MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion.
Chiappim W, Watanabe M, Dias V, Testoni G, Rangel R, Fraga M, Maciel H, Dos Santos Filho S, Pessoa R.
Chiappim W, et al.
Nanomaterials (Basel). 2020 Feb 17;10(2):338. doi: 10.3390/nano10020338.
Nanomaterials (Basel). 2020.
PMID: 32079219
Free PMC article.
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The Influence of AlN Intermediate Layer on the Structural and Chemical Properties of SiC Thin Films Produced by High-Power Impulse Magnetron Sputtering.
Galvão N, Guerino M, Campos T, Grigorov K, Fraga M, Rodrigues B, Pessoa R, Camus J, Djouadi M, Maciel H.
Galvão N, et al.
Micromachines (Basel). 2019 Mar 22;10(3):202. doi: 10.3390/mi10030202.
Micromachines (Basel). 2019.
PMID: 30909406
Free PMC article.
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