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Crystallinity Effect on Electrical Properties of PEALD-HfO2 Thin Films Prepared by Different Substrate Temperatures.
Nanomaterials (Basel). 2022 Nov 3;12(21):3890. doi: 10.3390/nano12213890.
Nanomaterials (Basel). 2022.
PMID: 36364666
Free PMC article.
Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy.
Zhao MJ, Zhang ZX, Hsu CH, Zhang XY, Wu WY, Lien SY, Zhu WZ.
Zhao MJ, et al.
Nanomaterials (Basel). 2021 Apr 10;11(4):978. doi: 10.3390/nano11040978.
Nanomaterials (Basel). 2021.
PMID: 33920231
Free PMC article.
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