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Femtosecond Laser Processing Assisted SiC High-Temperature Pressure Sensor Fabrication and Performance Test.
Micromachines (Basel). 2023 Feb 28;14(3):587. doi: 10.3390/mi14030587.
Micromachines (Basel). 2023.
PMID: 36984993
Free PMC article.
Experimental Investigation on Ablation of 4H-SiC by Infrared Femtosecond Laser.
Wang L, Zhao Y, Yang Y, Zhang M, Zhao Y.
Wang L, et al.
Micromachines (Basel). 2022 Aug 11;13(8):1291. doi: 10.3390/mi13081291.
Micromachines (Basel). 2022.
PMID: 36014215
Free PMC article.
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