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Overview of the MEMS Pirani Sensors.
Micromachines (Basel). 2022 Jun 14;13(6):945. doi: 10.3390/mi13060945.
Micromachines (Basel). 2022.
PMID: 35744559
Free PMC article.
Review.
A Thermopile Detector Based on Micro-Bridges for Heat Transfer.
Zhou N, Ding X, Li H, Ni Y, Pu Y, Mao H.
Zhou N, et al.
Micromachines (Basel). 2021 Dec 13;12(12):1554. doi: 10.3390/mi12121554.
Micromachines (Basel). 2021.
PMID: 34945404
Free PMC article.
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