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Development of an Optoelectronic Integrated Sensor for a MEMS Mirror-Based Active Structured Light System.
Micromachines (Basel). 2023 Feb 27;14(3):561. doi: 10.3390/mi14030561.
Micromachines (Basel). 2023.
PMID: 36984968
Free PMC article.
MEMS Enabled Miniature Two-Photon Microscopy for Biomedical Imaging.
Yu X, Zhou L, Qi T, Zhao H, Xie H.
Yu X, et al.
Micromachines (Basel). 2023 Feb 17;14(2):470. doi: 10.3390/mi14020470.
Micromachines (Basel). 2023.
PMID: 36838170
Free PMC article.
Review.
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Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders.
Pan J, Bai C, Zheng Q, Xie H.
Pan J, et al.
Micromachines (Basel). 2023 Feb 2;14(2):374. doi: 10.3390/mi14020374.
Micromachines (Basel). 2023.
PMID: 36838074
Free PMC article.
Review.
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