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Overview of the MEMS Pirani Sensors.
Micromachines (Basel). 2022 Jun 14;13(6):945. doi: 10.3390/mi13060945.
Micromachines (Basel). 2022.
PMID: 35744559
Free PMC article.
Review.
A Thermopile Detector Based on Micro-Bridges for Heat Transfer.
Zhou N, Ding X, Li H, Ni Y, Pu Y, Mao H.
Zhou N, et al.
Micromachines (Basel). 2021 Dec 13;12(12):1554. doi: 10.3390/mi12121554.
Micromachines (Basel). 2021.
PMID: 34945404
Free PMC article.
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The Study of Reactive Ion Etching of Heavily Doped Polysilicon Based on HBr/O2/He Plasmas for Thermopile Devices.
Zhou N, Li J, Mao H, Liu H, Liu J, Gao J, Xiang J, Hu Y, Shi M, Ju J, Lei Y, Yang T, Li J, Wang W.
Zhou N, et al.
Materials (Basel). 2020 Sep 25;13(19):4278. doi: 10.3390/ma13194278.
Materials (Basel). 2020.
PMID: 32992794
Free PMC article.
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