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Fabrication and Characteristic of a Double Piezoelectric Layer Acceleration Sensor Based on Li-Doped ZnO Thin Film.
Micromachines (Basel). 2019 May 17;10(5):331. doi: 10.3390/mi10050331.
Micromachines (Basel). 2019.
PMID: 31108993
Free PMC article.
Fabrication and Characteristics of a SOI Three-Axis Acceleration Sensor Based on MEMS Technology.
Zhao X, Wang Y, Wen D.
Zhao X, et al.
Micromachines (Basel). 2019 Apr 9;10(4):238. doi: 10.3390/mi10040238.
Micromachines (Basel). 2019.
PMID: 30970643
Free PMC article.
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