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Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure.
Sensors (Basel). 2021 Jun 14;21(12):4088. doi: 10.3390/s21124088.
Sensors (Basel). 2021.
PMID: 34198533
Free PMC article.
In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection.
Setiono A, Bertke M, Nyang'au WO, Xu J, Fahrbach M, Kirsch I, Uhde E, Deutschinger A, Fantner EJ, Schwalb CH, Wasisto HS, Peiner E.
Setiono A, et al.
Sensors (Basel). 2020 Jan 22;20(3):618. doi: 10.3390/s20030618.
Sensors (Basel). 2020.
PMID: 31979161
Free PMC article.
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