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Towards High-Temperature MEMS: Two-Step Annealing Suppressed Recrystallization in Thin Multilayer Pt-Rh/Zr Films.
Micromachines (Basel). 2023 Oct 28;14(11):2003. doi: 10.3390/mi14112003.
Micromachines (Basel). 2023.
PMID: 38004860
Free PMC article.
Long-Term Operational Stability of Ta/Pt Thin-Film Microheaters: Impact of the Ta Adhesion Layer.
Kalinin IA, Roslyakov IV, Khmelenin DN, Napolskii KS.
Kalinin IA, et al.
Nanomaterials (Basel). 2022 Dec 25;13(1):94. doi: 10.3390/nano13010094.
Nanomaterials (Basel). 2022.
PMID: 36616004
Free PMC article.
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