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Table representation of search results timeline featuring number of search results per year.
Year | Number of Results |
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2018 | 1 |
2019 | 1 |
2021 | 2 |
2024 | 0 |
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Page 1
Morphological and Compositional Studies on Al/Ti/TiN/Si, Al/TiN/Si, Al/W/Si, Al/WN/Si Systems to Test the Diffusion Barrier Properties of Nanoscale-Thick Layers between Al and Si.
Micromachines (Basel). 2021 Jul 21;12(8):849. doi: 10.3390/mi12080849.
Micromachines (Basel). 2021.
PMID: 34442471
Free PMC article.
Rapid Prototyping of Inertial MEMS Devices through Structural Optimization.
Giannini D, Bonaccorsi G, Braghin F.
Giannini D, et al.
Sensors (Basel). 2021 Jul 26;21(15):5064. doi: 10.3390/s21155064.
Sensors (Basel). 2021.
PMID: 34372301
Free PMC article.
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Estimation of Air Damping in Out-of-Plane Comb-Drive Actuators.
Mirzazadeh R, Mariani S.
Mirzazadeh R, et al.
Micromachines (Basel). 2019 Apr 19;10(4):263. doi: 10.3390/mi10040263.
Micromachines (Basel). 2019.
PMID: 31010138
Free PMC article.
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Characterization of Tunable Micro-Lenses with a Versatile Optical Measuring System.
Merlo S, Crisà E, Giusti D, Ferrera M, Soldo M.
Merlo S, et al.
Sensors (Basel). 2018 Dec 12;18(12):4396. doi: 10.3390/s18124396.
Sensors (Basel). 2018.
PMID: 30545109
Free PMC article.
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