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2021 | 1 |
2022 | 1 |
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A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure.
Micromachines (Basel). 2022 Jan 26;13(2):186. doi: 10.3390/mi13020186.
Micromachines (Basel). 2022.
PMID: 35208310
Free PMC article.
MEMS-Based Electrochemical Seismometer with a Sensing Unit Integrating Four Electrodes.
Qi W, Xu C, Liu B, She X, Liang T, Chen D, Wang J, Chen J.
Qi W, et al.
Micromachines (Basel). 2021 Jun 15;12(6):699. doi: 10.3390/mi12060699.
Micromachines (Basel). 2021.
PMID: 34203906
Free PMC article.
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A MEMS Electrochemical Angular Accelerometer with Silicon-Based Four-Electrode Structure.
Zhang M, Liu Q, Zhu M, Chen J, Chen D, Wang J, Lu Y.
Zhang M, et al.
Micromachines (Basel). 2024 Feb 29;15(3):351. doi: 10.3390/mi15030351.
Micromachines (Basel). 2024.
PMID: 38542598
Free PMC article.
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