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2020 | 1 |
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PECVD of Hexamethyldisiloxane Coatings Using Extremely Asymmetric Capacitive RF Discharge.
Materials (Basel). 2020 May 6;13(9):2147. doi: 10.3390/ma13092147.
Materials (Basel). 2020.
PMID: 32384729
Free PMC article.
Deposition Kinetics of Thin Silica-Like Coatings in a Large Plasma Reactor.
Gosar Ž, Đonlagić D, Pevec S, Kovač J, Mozetič M, Primc G, Vesel A, Zaplotnik R.
Gosar Ž, et al.
Materials (Basel). 2019 Oct 3;12(19):3238. doi: 10.3390/ma12193238.
Materials (Basel). 2019.
PMID: 31623307
Free PMC article.
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