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High-Quality Recrystallization of Amorphous Silicon on Si (100) Induced via Laser Annealing at the Nanoscale.
Nanomaterials (Basel). 2023 Jun 15;13(12):1867. doi: 10.3390/nano13121867.
Nanomaterials (Basel). 2023.
PMID: 37368297
Free PMC article.
Study of Selective Dry Etching Effects of 15-Cycle Si0.7Ge0.3/Si Multilayer Structure in Gate-All-Around Transistor Process.
Liu E, Li J, Zhou N, Chen R, Shao H, Gao J, Zhang Q, Kong Z, Lin H, Zhang C, Lai P, Yang C, Liu Y, Wang G, Zhao C, Yang T, Yin H, Li J, Luo J, Wang W.
Liu E, et al.
Nanomaterials (Basel). 2023 Jul 21;13(14):2127. doi: 10.3390/nano13142127.
Nanomaterials (Basel). 2023.
PMID: 37513138
Free PMC article.
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Investigation on Recrystallization Channel for Vertical C-Shaped-Channel Nanosheet FETs by Laser Annealing.
Chen Z, Zhu H, Wang G, Wang Q, Xiao Z, Zhang Y, Liu J, Lu S, Du Y, Yu J, Xiong W, Kong Z, Du A, Yan Z, Zheng Y.
Chen Z, et al.
Nanomaterials (Basel). 2023 Jun 1;13(11):1786. doi: 10.3390/nano13111786.
Nanomaterials (Basel). 2023.
PMID: 37299689
Free PMC article.
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