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Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD.
Sensors (Basel). 2023 Jun 14;23(12):5563. doi: 10.3390/s23125563.
Sensors (Basel). 2023.
PMID: 37420730
Free PMC article.
Artificial-Neural-Network-Driven Innovations in Time-Varying Process Diagnosis of Low-K Oxide Deposition.
Lee S, Park Y, Liu P, Kim M, Kim HU, Kim T.
Lee S, et al.
Sensors (Basel). 2023 Oct 2;23(19):8226. doi: 10.3390/s23198226.
Sensors (Basel). 2023.
PMID: 37837056
Free PMC article.
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Direct methane protonic ceramic fuel cells with self-assembled Ni-Rh bimetallic catalyst.
Hong K, Choi M, Bae Y, Min J, Lee J, Kim D, Bang S, Lee HK, Lee W, Hong J.
Hong K, et al.
Nat Commun. 2023 Nov 18;14(1):7485. doi: 10.1038/s41467-023-43388-8.
Nat Commun. 2023.
PMID: 37980343
Free PMC article.
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