Search Page
Save citations to file
Email citations
Send citations to clipboard
Add to Collections
Add to My Bibliography
Create a file for external citation management software
Your saved search
Your RSS Feed
Search Results
2 results
Filters applied: . Clear all
Page 1
Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD.
Sensors (Basel). 2023 Jun 14;23(12):5563. doi: 10.3390/s23125563.
Sensors (Basel). 2023.
PMID: 37420730
Free PMC article.
Artificial-Neural-Network-Driven Innovations in Time-Varying Process Diagnosis of Low-K Oxide Deposition.
Lee S, Park Y, Liu P, Kim M, Kim HU, Kim T.
Lee S, et al.
Sensors (Basel). 2023 Oct 2;23(19):8226. doi: 10.3390/s23198226.
Sensors (Basel). 2023.
PMID: 37837056
Free PMC article.
Item in Clipboard
Cite
Cite