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Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror.
Micromachines (Basel). 2022 Jun 25;13(7):1000. doi: 10.3390/mi13071000.
Micromachines (Basel). 2022.
PMID: 35888817
Free PMC article.
Miniature Broadband NIR Spectrometer Based on FR4 Electromagnetic Scanning Micro-Grating.
Huang L, Wen Q, Huang J, Yu F, Lei H, Wen Z.
Huang L, et al.
Micromachines (Basel). 2020 Apr 10;11(4):393. doi: 10.3390/mi11040393.
Micromachines (Basel). 2020.
PMID: 32290131
Free PMC article.
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Investigation of Plasma Activated Si-Si Bonded Interface by Infrared Image Based on Combination of Spatial Domain and Morphology.
Du M, Li D, Liu Y.
Du M, et al.
Micromachines (Basel). 2019 Jul 2;10(7):445. doi: 10.3390/mi10070445.
Micromachines (Basel). 2019.
PMID: 31269705
Free PMC article.
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