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Ion-Enhanced Etching Characteristics of sp2-Rich Hydrogenated Amorphous Carbons in CF4 Plasmas and O2 Plasmas.
Materials (Basel). 2021 May 29;14(11):2941. doi: 10.3390/ma14112941.
Materials (Basel). 2021.
PMID: 34072492
Free PMC article.
Surface Texturing of Si with Periodically Arrayed Oblique Nanopillars to Achieve Antireflection.
Kim JH, You S, Kim CK.
Kim JH, et al.
Materials (Basel). 2021 Jan 14;14(2):380. doi: 10.3390/ma14020380.
Materials (Basel). 2021.
PMID: 33466751
Free PMC article.
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