Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films

Opt Lett. 2009 Apr 15;34(8):1234-6. doi: 10.1364/ol.34.001234.

Abstract

Single-mode optical rib waveguides operating at telecommunication wavelengths are successfully patterned via a hot embossing technique in a thermally evaporated chalcogenide glass thin film on a chalcogenide glass substrate. Ellipsometry is used to measure the refractive index dispersion of the pressed film (As(40)Se(60)) and substrate (Ge(17)As(18)Se(65)).