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Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System.
Micromachines (Basel). 2018 Feb 28;9(3):104. doi: 10.3390/mi9030104.
Micromachines (Basel). 2018.
PMID: 30424038
Free PMC article.
Optical MEMS pressure sensor based on a mesa-diaphragm structure.
Ge Y, Wang M, Yan H.
Ge Y, et al.
Opt Express. 2008 Dec 22;16(26):21746-52. doi: 10.1364/oe.16.021746.
Opt Express. 2008.
PMID: 19104607
Free article.
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Design Optimization and Fabrication of High-Sensitivity SOI Pressure Sensors with High Signal-to-Noise Ratios Based on Silicon Nanowire Piezoresistors.
Zhang J, Zhao Y, Ge Y, Li M, Yang L, Mao X.
Zhang J, et al. Among authors: ge y.
Micromachines (Basel). 2016 Oct 14;7(10):187. doi: 10.3390/mi7100187.
Micromachines (Basel). 2016.
PMID: 30404360
Free PMC article.
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