Fast response and high sensitivity ZnO/glass surface acoustic wave humidity sensors using graphene oxide sensing layer

Weipeng Xuan; Mei He; Nan Meng; Xingli He; Wenbo Wang; Jinkai Chen; Tianjin Shi; Tawfique Hasan; Zhen Xu; Yang Xu; J K Luo

doi:10.1038/srep07206

Fast response and high sensitivity ZnO/glass surface acoustic wave humidity sensors using graphene oxide sensing layer

Sci Rep. 2014 Nov 26:4:7206. doi: 10.1038/srep07206.

Authors

Weipeng Xuan¹, Mei He¹, Nan Meng¹, Xingli He¹, Wenbo Wang¹, Jinkai Chen¹, Tianjin Shi¹, Tawfique Hasan², Zhen Xu³, Yang Xu¹, J K Luo⁴

Affiliations

¹ Dept. of Info. Sci. &Electric. Eng., Zhejiang University and Cyrus Tang Center for Sensor Materials and Applications, 38 Zheda Road, Hangzhou 310027, P.R. China.
² Cambridge Graphene Centre, University of Cambridge, Cambridge CB3 0FA, United Kingdom.
³ MOE Key Lab. of Macromolecul. Synth. &Funct., Dept. of Polym. Sci. &Eng., Zhejiang University, 38 Zheda Road, Hangzhou 310027, P. R. China.
⁴ 1] Inst. of Renew. Energ. &Environ. Technol., University of Bolton, Deane Road, Bolton BL3 5AB, United Kingdom [2] Dept. of Info. Sci. &Electric. Eng., Zhejiang University and Cyrus Tang Center for Sensor Materials and Applications, 38 Zheda Road, Hangzhou 310027, P.R. China.

Abstract

We report ZnO/glass surface acoustic wave (SAW) humidity sensors with high sensitivity and fast response using graphene oxide sensing layer. The frequency shift of the sensors is exponentially correlated to the humidity change, induced mainly by mass loading effect rather than the complex impedance change of the sensing layer. The SAW sensors show high sensitivity at a broad humidity range from 0.5%RH to 85%RH with < 1 sec rise time. The simple design and excellent stability of our GO-based SAW humidity sensors, complemented with full humidity range measurement, highlights their potential in a wide range of applications.

Publication types

Research Support, Non-U.S. Gov't